T/CIECCPA 007-2024
Semiconductor Industry Nitrogen Oxide Emission Requirements (English Version)

Standard No.

T/CIECCPA 007-2024

Language

Chinese, Available in English version

Release Date

2024

Published By

Group Standards of the People's Republic of China

Latest

T/CIECCPA 007-2024

Scope

This document stipulates the emission standard limits, testing requirements, and compliance determination requirements for atmospheric pollutants nitrogen oxides produced during the industrial production process of the semiconductor industry.

T/CIECCPA 007-2024 history

• 2024 T/CIECCPA 007-2024 Semiconductor Industry Nitrogen Oxide Emission Requirements
• 2023 T/CIECCPA 007-2023 Technical specification for recycling of retired traction battery uesd in electric vehicle
• 2022 T/CIECCPA 007-2022 Technical specification for on-line quality and quantity monitoring in pipeline direct drinking water system
• 2020 T/CIECCPA 007-2020 General principle for energy saving diagnosis of industrial enterprises