CEI EN 62047-11:2014
Semiconductor devices - Micro-electromechanical devices Part 11: Test method for coefficients of linear thermal expansion of freestanding materials for micro-electromechanical systems

Standard No.

CEI EN 62047-11:2014

Release Date

2014

Published By

SCC

Latest

CEI EN 62047-11:2014

CEI EN 62047-11:2014 history

• 2014 CEI EN 62047-11:2014 Semiconductor devices - Micro-electromechanical devices Part 11: Test method for coefficients of linear thermal expansion of freestanding materials for micro-electromechanical systems