1 Scope
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
BS EN ISO 25178-607:2019 history
2019BS EN ISO 25178-607:2019 Geometrical product specifications (GPS). Surface texture: Areal - Nominal characteristics of non-contact (confocal microscopy) instruments