ISO 20146:2019
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
- Standard No.
- ISO 20146:2019
- Release Date
- 2019
- Published By
- International Organization for Standardization (ISO)
- Latest
- ISO 20146:2019
- Scope
- This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
ISO 20146:2019 Referenced Document
- ISO 27893 Vacuum technology - Vacuum gauges - Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
- ISO 3529-1 Vacuum technology — Vocabulary — Part 1: General terms*， 2019-07-16 Update
- ISO 3529-3 Vacuum technology - Vocabulary - Part 3: Total and partial pressure vacuum gauges
- ISO 3567 Vacuum gauges - Calibration by direct comparison with a reference gauge
- ISO/IEC Guide 98-3 Uncertainty of measurement - Guide to the expression of uncertainty in measurement (GUM:1995). Extension to any number of output quantities
- ISO/IEC Guide 99
ISO 20146:2019 history
- 2019 ISO 20146:2019 Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
