GB/T 19502-2023 - Surface chemical analysis—General rules for glow discharge optical emission spectrometry (GD-OES)

Standard No.: GB/T 19502-2023
Language: Chinese, Available in English version
Release Date: 2023
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 19502-2023
Replace: GB/T 19502-2004

Introduction: The Surface Chemical Analysis Glow Discharge Spectroscopy (GDS) method general rule standard, designated as GB/T 19502-2023, was published by the General Administration of Quality Supervision of China on December 28, 2023. This national standard is set to be implemented starting from July 1, 2024. It provides guidelines and procedures for conducting surface chemical analysis using glow discharge emission spectroscopy (GDS). The GDS method allows for the quantitative determination of elemental compositions in thin films or surfaces with high precision. This new edition updates previous versions by incorporating recent advancements in analytical chemistry and instrumentation technology to enhance the accuracy and applicability of the technique. It is intended for use across various industries including semiconductor manufacturing, materials science research, and quality control laboratories.

*** Please note: This description may not be accurate, please refer to the official documentation.

GB/T 19502-2023 history

2023 GB/T 19502-2023 Surface chemical analysis—General rules for glow discharge optical emission spectrometry (GD-OES)
2004 GB/T 19502-2004 Surface chemical analysis-Glow discharge optical emission spectrometry(GD-OSE)-Introduction to use