GB/T 29732-2021 Surface chemical analysis—Medium resolution auger electron spectrometers—Calibration of energy scales for elemental analysis (English Version)
This document specifies the calibration method for the Auger electron spectrometer when the kinetic energy scale uncertainty is 3eV, and is used to identify conventional elements on the surface. In addition, this document also specifies a method for determining the calibration cycle. This document applies to instruments with a resolution of less than or equal to 0.5% in direct mode or differential mode, with a peak modulation amplitude of 2 eV in differential mode, equipped with an inert gas ion gun or other sample cleaning method, and with a beam energy of 4 keV or higher. instrument.
GB/T 29732-2021 Referenced Document
ISO 18115 Surface chemical analysis - Vocabulary; Amndment 2
GB/T 29732-2021 history
2021GB/T 29732-2021 Surface chemical analysis—Medium resolution auger electron spectrometers—Calibration of energy scales for elemental analysis
2013GB/T 29732-2013 Surface chemical analysis.Medium resolution Auger electron spectrometers.Calibration of energy scales for elemental analysis