ISO/PRF 5861:2024
Surface chemical analysis — X-ray photoelectron spectroscopy — Method of intensity calibration for quartz-crystal monochromated Al Kα XPS instruments

Standard No.

ISO/PRF 5861:2024

Release Date

2024

Published By

International Organization for Standardization (ISO)

Latest

ISO/PRF 5861:2024

Introduction

This document specifies the methodology for calibrating the intensity of X-ray photoelectron spectrometers equipped with monochromatic Al K_α sources using a quartz crystal. It provides detailed procedures and requirements for ensuring accurate measurements in surface chemical analysis by XPS (X-ray Photoelectron Spectroscopy).

*** Please note: This description may not be accurate, please refer to the official documentation.

ISO/PRF 5861:2024 history

• 2024 ISO/PRF 5861:2024 Surface chemical analysis — X-ray photoelectron spectroscopy — Method of intensity calibration for quartz-crystal monochromated Al Kα XPS instruments

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