T/ZZB 2283-2021
Ultra-high purity graphite powder for semiconductor silicon carbide crystal (English Version)
- Standard No.
- T/ZZB 2283-2021
- Language
- Chinese, Available in English version
- Release Date
- 2021
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/ZZB 2283-2021
- Scope
- This document specifies the terms and definitions of ultra-high purity graphite powder for semiconductor grade silicon carbide single crystal, material specifications, basic requirements, technical requirements, test methods, inspection rules, labeling, packaging, transportation and storage, and quality commitments. This document applies to graphite powder for semiconductor-grade silicon carbide single crystals with a purity above 5 N (99.999 wt%).
T/ZZB 2283-2021 history
- 2021 T/ZZB 2283-2021 Ultra-high purity graphite powder for semiconductor silicon carbide crystal
