KS D ISO 16413-2021
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Standard No.
KS D ISO 16413-2021
Release Date
2021
Published By
KR-KS
Latest
KS D ISO 16413-2021

KS D ISO 16413-2021 history

  • 2021 KS D ISO 16413-2021 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting



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