T/ICMTIA 5.1-2020
ArF Dry photo resist for Integrated circuits (English Version)

Standard No.

T/ICMTIA 5.1-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

Group Standards of the People's Republic of China

Latest

T/ICMTIA 5.1-2020

Scope

This document specifies the requirements, test methods, detection standards, packaging, transportation, and storage requirements for ArF dry photoresist.

T/ICMTIA 5.1-2020 history

• 2020 T/ICMTIA 5.1-2020 ArF Dry photo resist for Integrated circuits