ASTM E983-19 PDF

Scope: 1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES). 1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects and suggestions are offered on how to minimize them. 1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided. 1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis. 1.5 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.7 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

ASTM E983-19 Referenced Document

ASTM E673 Standard Terminology Relating to Surface Analysis
ASTM E996 Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

2019 ASTM E983-19 Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
2018 ASTM E983-10(2018) Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
2010 ASTM E983-10 Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
2005 ASTM E983-05 Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
2004 ASTM E983-04 Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
1994 ASTM E983-94(1999) Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy