T/IAWBS 016-2022
X-ray double crystal rocking curve FWHM test method for silicon carbide single wafer (English Version)
- Standard No.
- T/IAWBS 016-2022
- Language
- Chinese, Available in English version
- Release Date
- 2022
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/IAWBS 016-2022
- Scope
- Based on the material performance characteristics of silicon carbide single crystal and combined with the current research level of domestic silicon carbide crystal quality inspection technology, this document stipulates the measurement principle, measurement accuracy guarantee, measurement steps, etc. of the silicon carbide single crystal rocking curve. The main structure and content of this document are as follows: The subject chapter of this document is divided into 9 chapters. The main contents include: scope, normative reference documents, terms and definitions, test principles, test instruments, interference factors, test environment, test samples, test Procedures, Precision, Test Reports and Appendix.
T/IAWBS 016-2022 history
- 2022 T/IAWBS 016-2022 X-ray double crystal rocking curve FWHM test method for silicon carbide single wafer
