The electrostatic chuck is an electrode group pattern with a specific functional structure set inside a dielectric material with a high relative dielectric constant, and is manufactured through integrated processes such as coagulation, sintering, and bonding. This document defines the terms and definitions of electrostatic chucks for compound semiconductor device etching processes, and stipulates their structure and classification, working conditions, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage.
T/CEPEA 0102-2023 history
2024T/CEPEA 0102-2023 Electrostatic chuck for etching process of compound semiconductor devices