DIN 32567-5 E:2014-11
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices
- Standard No.
- DIN 32567-5 E:2014-11
- Release Date
- 1970
- Published By
- /
- Status
- Replace By
- DIN 32567-5:2015
- Latest
- DIN 32567-5:2015-06
DIN 32567-5 E:2014-11 history
- 2015 DIN 32567-5:2015-06 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices
- 2015 DIN 32567-5:2015 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices
- 1970 DIN 32567-5 E:2014-11 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices
