T/SHMHZQ 021-2023
Technical requirements specification for semiconductor vacuum valves (English Version)

Standard No.

T/SHMHZQ 021-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/SHMHZQ 021-2023

Scope

Preface 1 Scope 2 Normative reference documents 3. Terms and definitions 4. Classification and model 5. Technical requirements 5.1 Structural requirements 5.2 Material requirements 5.3 Performance requirements 5.4 Design requirements 5.5 Manufacturing requirements 5.6 Inspection requirements 5.7 Usage requirements 5.8 Test methods 5.9 Inspection rules 6 .Form and basic parameters 6.1 Drive type 6.2 Model representation method 6.3 Basic parameters and connection dimensions 7. Marking, packaging, transportation and storage 7.1 Marking 7.2 Packaging 7.3 Transportation 7.4 Storage 8. Requirements and evaluation

T/SHMHZQ 021-2023 history

• 2023 T/SHMHZQ 021-2023 Technical requirements specification for semiconductor vacuum valves
• 2022 T/SHMHZQ 021-2022 Automobile paint protective film
• 2021 T/SHMHZQ 021-2021 General specification for table display stands