GB/T 39516-2020 (English Version) PDF

Scope: This standard specifies the terms and definitions, types and basic parameters, requirements, inspection conditions, inspection methods, marking, transportation and storage of micro and nano standard samples (geometric quantities). This standard is applicable to the micro-nano wire spacing standard sample with a line spacing of 0.05 pm to 10 wm, the micro-nano step height standard sample with a step height of 0.01 Am to 100 pm, and the film thickness of 2 nm to 1 000 nm. Nanofilm thickness standard sample and nanometer line width standard sample with line width from 25 nm to 1 000 nm.

GB/T 39516-2020 history