DANSK DS/EN 62047-6:2010
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

Standard No.

DANSK DS/EN 62047-6:2010

Release Date

2010

Published By

SCC

Latest

DANSK DS/EN 62047-6:2010

DANSK DS/EN 62047-6:2010 history

• 2010 DANSK DS/EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials