IEC 62047-32:2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Standard No.

IEC 62047-32:2019

Release Date

2019

Published By

International Electrotechnical Commission (IEC)

Latest

IEC 62047-32:2019

Scope

This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

IEC 62047-32:2019 history

• 2019 IEC 62047-32:2019 Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators