CEI EN 62047-6:2011
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

Standard No.

CEI EN 62047-6:2011

Release Date

2011

Published By

SCC

Latest

CEI EN 62047-6:2011

CEI EN 62047-6:2011 history

• 2011 CEI EN 62047-6:2011 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials