This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage and safety of gas difluoromethane (hereinafter referred to as difluoromethane) used in the electronic industry. This document applies to difluoromethane for the electronic industry which is purified and prepared from industrial difluoromethane as raw material. It is used as an etching gas in the plasma etching process of the electronic industry.
T/CHBAS 50-2023 history
2023T/CHBAS 50-2023 Gas difluoromethane for electronic industry