T/ZGM 003-2022
Assessment requirements for quality grading and forerunner - Membrane elements for terminal filtration in the semiconductor industry (English Version)

Standard No.

T/ZGM 003-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Status

Be replaced 2023-09

Replace By

T/ZGM 003-2023

Latest

T/ZGM 003-2024

Scope

Suitable for semiconductor cleaning, glue development and etching processes. The thickness, flux, bubble point, metal dissolution and NVR dissolution of the microporous filter membrane are required to meet the process requirements.

T/ZGM 003-2022 history

• 2024 T/ZGM 003-2024 Green product household drinking water treatment equipment
• 2023 T/ZGM 003-2023 Assessment requirements for quality grading and forerunner — Submerged hollow fiber ultrafiltration membrane modules for drinking water treatment
• 2022 T/ZGM 003-2022 Assessment requirements for quality grading and forerunner - Membrane elements for terminal filtration in the semiconductor industry
• 2021 T/ZGM 003-2021 Assessment requirements for forerunner standard—Ultrafiltration membranes