BS IEC 62047-30:2017
Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Standard No.

BS IEC 62047-30:2017

Release Date

2017

Published By

British Standards Institution (BSI)

Latest

BS IEC 62047-30:2017

Scope

What is BS IEC 62047 ‑ 30 - MEMS piezoelectric thin film about ?      BS IEC 62047 is an international standard that discusses semiconductor devices including microelectromechanical devices. The main aim of the IEC 62047 series is to provide entities involved with semiconductor technology with best industry techniques to demonstrate the reliability and performance of their devices and components.   BS IEC 62047 ‑ 30 is the 30

BS IEC 62047-30:2017 history

• 2017 BS IEC 62047-30:2017 Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film