ASTM E1078-14(2020) PDF

Scope: 1.1 This guide covers specimen preparation and mounting prior to, during, and following surface analysis and applies to the following surface analysis disciplines: 1.1.1 Auger electron spectroscopy (AES), 1.1.2 X-ray photoelectron spectroscopy (XPS and ESCA), and 1.1.3 Secondary ion mass spectrometry (SIMS). 1.1.4 Although primarily written for AES, XPS, and SIMS, these methods will also apply to many surface sensitive analysis methods, such as ion scattering spectrometry, low energy electron diffraction, and electron energy loss spectroscopy, where specimen handling can influence surface sensitive measurements. 1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

ASTM E1078-14(2020) Referenced Document

ASTM E1127 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
ASTM E1523 Standard Guide to Charge Control and Charge Referencing Techniques in X-Ray Photoelectron Spectroscopy
ASTM E1829 Standard Guide for Handling Specimens Prior to Surface Analysis
ASTM E983 Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

2020 ASTM E1078-14(2020) Standard Guide for Specimen Preparation and Mounting in Surface Analysis
2014 ASTM E1078-14 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
2009 ASTM E1078-09 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
2002 ASTM E1078-02 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
1997 ASTM E1078-97 Standard Guide for Procedures for Specimen Preparation and Mounting in Surface Analysis