T/CEMIA 006-2018
Quartz crystal resonator for film thickness control (English Version)

Standard No.

T/CEMIA 006-2018

Language

Chinese, Available in English version

Release Date

2018

Published By

Group Standards of the People's Republic of China

Latest

T/CEMIA 006-2018

Scope

This standard specifies the product classification, technical requirements, test and measurement methods, inspection rules, marking, packaging, transportation and storage requirements for quartz crystal oscillators used for film thickness monitoring.

T/CEMIA 006-2018 history

• 2018 T/CEMIA 006-2018 Quartz crystal resonator for film thickness control