IEC 63068-3:2020
Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 3: Test method for defects using photoluminescence

Standard No.

IEC 63068-3:2020

Release Date

2020

Published By

International Electrotechnical Commission (IEC)

Latest

IEC 63068-3:2020

IEC 63068-3:2020 history

• 2020 IEC 63068-3:2020 Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 3: Test method for defects using photoluminescence