BS ISO 21859:2019
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
- Standard No.
- BS ISO 21859:2019
- Release Date
- 2019
- Published By
- British Standards Institution (BSI)
- Latest
- BS ISO 21859:2019
- Scope
- What is ISO 21859 - Plasma resistance of ceramic components about? ISO 21859 is an international standard on fine ceramics which covers a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. ISO 21859 specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing. Who is ISO 21859 - Plasma resistance of ceramic components for? ...
BS ISO 21859:2019 history
- 2019 BS ISO 21859:2019 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
