SJ/T 31153-1994
Requirements of readiness and methods of inspection and assessment for oil-free ultra-high vacuum exhaust stations (English Version)

Standard No.

SJ/T 31153-1994

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ/T 31153-1994

Scope

This standard specifies the integrity requirements and inspection and evaluation methods for ultra-high vacuum oil-free exhaust equipment. This standard applies to ultra-high vacuum oil-free exhaust equipment.

SJ/T 31153-1994 history

• 1970 SJ/T 31153-1994 Requirements of readiness and methods of inspection and assessment for oil-free ultra-high vacuum exhaust stations