SJ/Z 2926-1988
Test methods for properties of mask-making equipment for manufacturing of ICs (English Version)
- Standard No.
- SJ/Z 2926-1988
- Language
- Chinese, Available in English version
- Release Date
- 1988
- Published By
- Professional Standard - Electron
- Latest
- SJ/Z 2926-1988
- Scope
- This guiding technical document is applicable to the main performance testing methods of three types of optical plate-making equipment: automatic engraving (drawing) machines, pattern generators, and reduction cameras. The purpose of the test is to check whether the technical performance indicators of the equipment meet the original design or usage requirements. Performance test methods not specified in this guiding technical document shall be separately specified in the technical documents of various types of equipment.
SJ/Z 2926-1988 history
- 1988 SJ/Z 2926-1988 Test methods for properties of mask-making equipment for manufacturing of ICs
