YS/T 26-1992
Wafer Edge Profile Inspection Method (English Version)

Standard No.

YS/T 26-1992

Language

Chinese, Available in English version

Release Date

1992

Published By

Professional Standard - Non-ferrous Metal

Status

Be replaced 2017-01

Replace By

YS/T 26-2016

Latest

YS/T 26-2016

YS/T 26-1992 history

• 2016 YS/T 26-2016 Silicon wafer edge contour inspection method
• 1992 YS/T 26-1992 Wafer Edge Profile Inspection Method