SJ/T 31082-1994
Requirements of readiness and methods of inspection and assessment for vacuum coating equipment (English Version)

Standard No.

SJ/T 31082-1994

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Latest

SJ/T 31082-1994

Scope

This standard specifies the integrity requirements and inspection and evaluation methods of vacuum coating equipment. The standard is applicable to various types of vacuum coating equipment with ultimate pressure in the range of 1×10^(-5)~1×10^(-4)pa.

SJ/T 31082-1994 history

• 1970 SJ/T 31082-1994 Requirements of readiness and methods of inspection and assessment for vacuum coating equipment