SJ/T 31107-1994
Requirements of readiness and methods of inspection and assessment for ZDS-1 electrophoresis apparatuses (English Version)

Standard No.

SJ/T 31107-1994

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ/T 31107-1994

Scope

This standard specifies the integrity requirements and inspection and evaluation methods of the ZDS-1 electrophoresis machine. This standard applies to electrophoresis machines similar to ZDS-1 used in the production of semiconductor devices.

SJ/T 31107-1994 history

• 1970 SJ/T 31107-1994 Requirements of readiness and methods of inspection and assessment for ZDS-1 electrophoresis apparatuses