This standard specifies the terminology, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage requirements, etc. of the four-probe probe. This standard is applicable to probes used in the electronics, metallurgy and other industries to test the resistivity, sheet resistance and resistance of semiconductor rods, sheets, thin layers and metal thin layers using the four-probe method. This standard is used in conjunction with the 3J/T 10314 "General Technical Conditions for DC Four-Probe Resistivity Tester" standard.
SJ/T 10315-1992 history
1992SJ/T 10315-1992 Generic specification of Four-point probe