SJ/T 11184-1998
General specifications for developing equipment (English Version)

Standard No.

SJ/T 11184-1998

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Latest

SJ/T 11184-1998

Replace

SJ 3194-1988

Scope

This standard specifies the definition, requirements, test methods, inspection rules and marking, packaging, transportation and storage of developing equipment. This standard applies to developing equipment for semiconductor integrated circuits, silicon wafers in transistors, quartz chrome plates, glass plates, etc.

SJ/T 11184-1998 history

• 1970 SJ/T 11184-1998 General specifications for developing equipment
• 0000 SJ 3194-1988