SJ/T 31068-1994
Requirements of readiness and methods of inspection and assessment for ion implantation machines (English Version)

Standard No.

SJ/T 31068-1994

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ/T 31068-1994

Scope

This standard specifies the integrity requirements and inspection and assessment methods for the LC-2F electric ion implanter and the 200MC-A ion implanter. This standard applies to ion implanters used in the production of integrated circuits for semiconductor devices.

SJ/T 31068-1994 history

• 1970 SJ/T 31068-1994 Requirements of readiness and methods of inspection and assessment for ion implantation machines