SJ 20714-1998
Test method for sub-surface damege of gallium arsenide polished wafer by X-ray double crystal diffraction (English Version)

Standard No.

SJ 20714-1998

Language

Chinese, Available in English version

Release Date

1998

Published By

Professional Standard - Electron

Latest

SJ 20714-1998

Scope

This standard specifies the X-ray twin crystal diffraction test method for the sub-damaged layer of gallium arsenide polished sheets. This standard is applicable to the qualitative measurement of the sub-damage layer of gallium arsenide wafers that have been chemically and mechanically polished on one side and both sides.

SJ 20714-1998 history

• 1998 SJ 20714-1998 Test method for sub-surface damege of gallium arsenide polished wafer by X-ray double crystal diffraction