SJ 3245-1989
Methods for measuring dislocation of Indium phosphide single-crystal (English Version)

Standard No.

SJ 3245-1989

Language

Chinese, Available in English version

Release Date

1989

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ 3245-1989

Scope

This standard specifies the principles, instrument reagents, and measurement procedures for corrosion display and microscopic measurement of (100) and (111) In plane dislocations in indium phosphide single crystals. This standard is applicable to the measurement of single crystals with dislocation density in the range of 0 to 10^(5)/cm^(2), and the crystal orientation deviation of the detected crystal plane is within 5°.

SJ 3245-1989 history

• 1989 SJ 3245-1989 Methods for measuring dislocation of Indium phosphide single-crystal