VDI/VDE 2655 Blatt 1.2-2009
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurements

Standard No.

VDI/VDE 2655 Blatt 1.2-2009

Release Date

2009

Published By

VDI - Verein Deutscher Ingenieure

Status

Be replaced

Replace By

VDI/VDE 2655 Blatt 1.2-2010

Latest

VDI/VDE 2655 Blatt 1.2-2010

VDI/VDE 2655 Blatt 1.2-2009 history

• 2010 VDI/VDE 2655 Blatt 1.2-2010 Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement
• 2009 VDI/VDE 2655 Blatt 1.2-2009 Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurements