DB13/T 5118-2019
General technical requirements for 4H SiC N-type homoepitaxial wafers (English Version)

Standard No.

DB13/T 5118-2019

Language

Chinese, Available in English version

Release Date

2019

Published By

Hebei Provincial Standard of the People's Republic of China

Latest

DB13/T 5118-2019

DB13/T 5118-2019 history

• 2019 DB13/T 5118-2019 General technical requirements for 4H SiC N-type homoepitaxial wafers