JB/T 2965-1992
Performance testing method of sputtering ion pump (English Version)

Standard No.

JB/T 2965-1992

Language

Chinese, Available in English version

Release Date

1992

Published By

Professional Standard - Machinery

Status

Withdraw

Latest

JB/T 2965-1992

Replace

JB 2965-1981

Scope

This standard specifies sputter ion pump performance test methods. This standard applies to ion pumps with pumping speeds greater than 10Ls(-1).

JB/T 2965-1992 history

• 1992 JB/T 2965-1992 Performance testing method of sputtering ion pump
• 0000 JB 2965-1981