JB/T 4081-1991
Sputtering ion pump type and basic parameters (English Version)
- Standard No.
- JB/T 4081-1991
- Language
- Chinese, Available in English version
- Release Date
- 1991
- Published By
- Professional Standard - Machinery
- Status
- 2012-04
- Replace By
- JB/T 4081-2011
- Latest
- JB/T 4081-2011
- Scope
- This standard specifies the types and basic parameters of common types of sputter ion pumps. This standard applies to two-potential diode and tripole sputter subpumps.
JB/T 4081-1991 history
- 2011 JB/T 4081-2011 Vacuum technology - Sputter ion pump
- 1991 JB/T 4081-1991 Sputtering ion pump type and basic parameters
