BH GSO IEC 62047-11:2022
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Standard No.

BH GSO IEC 62047-11:2022

Published By

GSO

Latest

BH GSO IEC 62047-11:2022

BH GSO IEC 62047-11:2022 history

• 1970 BH GSO IEC 62047-11:2022 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems