This standard specifies the structure, specifications, technical requirements, inspection methods and rules of quartz glass tubes for power semiconductor device processing purposes. This standard applies to quartz glass tubes made of natural crystal as raw materials and made into a high-temperature resistant thin layer on the surface of the tube wall for use in power semiconductor device technology.
JB/T 8320-1996 history
1996JB/T 8320-1996 Coated quartz glass tubes intended to be used in the production process of power semiconductor devices