GB/T 42158-2023 Description and measurement methods of micro-groove and pyramid-like needle structures in microelectromechanical systems (MEMS) technology (English Version)
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
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GB/T 42158-2023
Introduction
《GB/T 42158-2023 Micro-electromechanical Systems (MEMS) Technology - Description and Measurement Methods for Microgroove and Pyramid Needle Structures》 provides a comprehensive description and measurement methods for microgroove and pyramid needle structures in MEMS technology.
This standard aims to establish a unified and standardized approach for the characterization and measurement of microgroove and pyramid needle structures, which are widely used in various MEMS devices. It covers detailed descriptions of the structural parameters, including dimensions, angles, and profiles, as well as the measurement methods for these parameters.
The standard emphasizes the importance of accurate and precise measurement techniques to ensure the consistency and reliability of MEMS devices. It provides guidelines for the selection and calibration of measurement instruments, as well as the procedures for sample preparation and measurement.
By following the measurement methods provided in this standard, engineers and researchers can effectively evaluate and compare the performance of different MEMS devices with microgroove and pyramid needle structures. This promotes the development and application of MEMS technology in various fields, such as telecommunications, healthcare, and consumer electronics.
Overall,《GB/T 42158-2023 Micro-electromechanical Systems (MEMS) Technology - Description and Measurement Methods for Microgroove and Pyramid Needle Structures》 serves as an essential reference for professionals in the MEMS industry, contributing to the advancement of MEMS technology and its applications.
GB/T 42158-2023 history
2023GB/T 42158-2023 Description and measurement methods of micro-groove and pyramid-like needle structures in microelectromechanical systems (MEMS) technology