T/CHBAS 47-2023
Hexafluoropropane gas for electronic industry (English Version)

Standard No.
T/CHBAS 47-2023
Language
Chinese, Available in English version
Release Date
2023
Published By
Group Standards of the People's Republic of China  CN  /  TUANTI
Latest
T/CHBAS 47-2023
 
Scope
This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage and safety of the gas hexafluoropropane (hereinafter referred to as hexafluoropropane) used in the electronic industry. This document applies to hexafluoropropane for the electronic industry that is purified and prepared from industrial hexafluoropropane as raw material. It is used as an etching gas in the plasma etching process of the electronic industry.

T/CHBAS 47-2023 history

Topics on standards and specifications

Propane hexahixix gas chromatography Propane hexahixahex peak position National Standard for Industrial Propane The content of BCH Propane hexahixix peak diagram CHH gas phase Propanoid 666 spectrum BHC content Propanoid 666 spectrum Propane hexahixix peak diagram Industrial propane execution Industrial propane quality

Standard and Specification

GA 13-2006 Hanging gaseous fire extinguishing equipment GB 50724-2011 Technical code for bulk gas purification and delivery system engineering GA 1203-2014 Extinguishing agent filling rules for gaseous fire extinguishing systems GB 51137-2015 Code for construction and acceptance of waste water and exhaust treatment engineering of the electronics industry QJ 903.15-1985 Rules for Preparation of Welding Process Documentation API MPMS 21.1-1993 Manual of Petroleum Measurement Standards Chapter 21 - Flow Measurement Using Electronic Metering Systems Section 1 - Electronic Gas Measurement (First Edition) IEC 60512-11-14:2003 Connectors for electronic equipment - Tests and measurements - Part 11-14: Climatic tests; Test 11p: Flowing single gas corrosion test DIN EN 88-3 E:2017-09 Safety and control devices for gas burners and gas burning appliances - Part 3: Pressure and/or flow rate regulators for inlet pressures up to and including 500 kPa, electronic types GOST R 70960-2023 Electrovacuum devices. System of designations LST EN 60512-11-14:2004 Connectors for electronic equipment. Tests and measurements. Part 11-14: Climatic tests. Test 11p: Flowing single gas corrosion test (IEC 60512-11-14:2003)


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