KS D 0261-2022
Visual inspection for silicon wafers with specular surfaces

Standard No.

KS D 0261-2022

Release Date

2022

Published By

Korean Agency for Technology and Standards (KATS)  KR  /  KATS

Latest

KS D 0261-2022

Introduction

This standard specifies the visual inspection requirements for silicon wafers with mirror surfaces. It outlines procedures and criteria to ensure that the appearance quality of such wafers meets specific standards. The document covers aspects like surface defects, particle contamination, and other visual characteristics crucial for the performance and reliability of semiconductor devices manufactured using these wafers.

*** Please note: This description may not be accurate, please refer to the official documentation.

KS D 0261-2022 history

• 2022 KS D 0261-2022 Visual inspection for silicon wafers with specular surfaces
• 0000 KS D 0261-2012(2017)
• 2012 KS D 0261-2012 Visual inspection for silicon wafers with specular surfaces
• 0000 KS D 0261-2002

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