GB/T 43661-2024
Surface chemical analysis Scanning probe microscopy Definition and calibration of spatial resolution of electrical scanning probe microscopy (ESPM, such as SSRM and SCM) for applications such as 2D dopant imaging (English Version)

Standard No.
GB/T 43661-2024
Language
Chinese, Available in English version
Release Date
2024
Published By
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China  CN  /  GB
Latest
GB/T 43661-2024
 
Introduction
This standard specifies the definition and calibration of spatial resolution for electrostatic scanning probe microscopy (ESPM), such as scanning spreading resistance microscopy (SSRM) and scanning capacitance microscopy (SCM). It provides guidelines for the application of these techniques in two-dimensional dopant imaging and other purposes. The document aims to ensure consistent and accurate measurements across different devices and laboratories, contributing to more reliable surface chemical analysis.

GB/T 43661-2024 history

  • 2024 GB/T 43661-2024 Surface chemical analysis Scanning probe microscopy Definition and calibration of spatial resolution of electrical scanning probe microscopy (ESPM, such as SSRM and SCM) for applications such as 2D dopant imaging

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Standard and Specification

BS ISO 21222:2020 Surface chemical analysis. Scanning probe microscopy. Procedure for the determination of elastic moduli for compliant materials using atomic force microscope ISO/TR 14187:2020 Surface chemical analysis — Characterization of nanostructured materials GSO ISO/TR 14187:2013 Surface chemical analysis -- Characterization of nanostructured materials GSO ISO/TR 14187:2025 Surface chemical analysis — Characterization of nanostructured materials ISO/DIS 10360-11:2021 Geometrical product specifications (GPS) — Acceptance and reverification tests for coordinate measuring systems (CMS) — Part 11: CMSs using the principle of X ASTM E1441-00(2005 Standard Guide for Computed Tomography (CT) Imaging ASTM E1441-00 Standard Guide for Computed Tomography (CT) Imaging ASTM D5753-18 Standard Guide for Planning and Conducting Geotechnical Borehole Geophysical Logging


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