GB/T 1558-2023
Infrared absorption test method for substituted carbon content in silicon (English Version)

Standard No.

GB/T 1558-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China  CN  /  GB

Latest

GB/T 1558-2023

Replace

GB/T 1558-2009

Introduction

In-depth interpretation of infrared absorption test method for substitutional carbon content in silicon

1. Background and significance of standard formulation

GB/T 1558—2023 replaces the old standard GB/T1558—2009, and is mainly applicable to the test of substitutional carbon atom content in p-type silicon single crystals with resistivity greater than $3~\Omega\cdot\mathrm{cm}$ and n-type silicon single crystals with resistivity greater than $1~\Omega\cdot\mathrm{cm}$.

This standard has an important position in the field of semiconductor materials and is mainly used to evaluate the quality and performance of silicon materials. With the rapid development of the semiconductor industry, higher requirements are put forward for the control of impurity content in silicon materials, so it is particularly important to update and improve this standard.

2. Analysis of Technology Evolution

Technical Dimensions	Old Standard (GB/T1558—2009)	New Standard (GB/T1558—2023)
Test Range	Test Range at Room Temperature: $5\times10^{15}~\mathrm{cm}^{-3}$ to the maximum solid solubility of carbon atoms in silicon.	New Low-temperature Test Range: When the temperature is lower than $80~K$, the test range shall not be less than $5\times10^{14}~\mathrm{cm}^{-3}$.
Method principle	A single-beam infrared spectrometer was used for testing.	The applicability of dual-beam and Fourier transform infrared spectrometers was added, and the method of subtracting lattice absorption by the difference spectrum method was optimized.
Instrument requirements	The instrument resolution requirements were not specified.	The resolution of the room temperature infrared spectrometer was added to $2~\mathrm{cm}^{-1}$, and the resolution of the low temperature infrared spectrometer was added to $1~\mathrm{cm}^{-1}$.

3. Recommendations for Standard Implementation

Case Study: Practice of a Semiconductor Company

After introducing the new version of the standard, a semiconductor company achieved efficient carbon content testing through the following steps:

1. Purchase a Fourier transform infrared spectrometer that meets the requirements (resolution $1~\mathrm{cm}^{-1}$).
2. Optimize the sample preparation process to ensure that the sample is mirror-polished on both sides and has no surface defects.
3. Establish a standardized test environment, control the temperature fluctuation within $\pm2~^\circ\mathrm{C}$, and use nitrogen to purge the optical path to reduce the influence of humidity.
4. Accurately calculate the carbon content and retain two significant digits through the difference spectrum drawing method in Appendix A.

GB/T 1558-2023 Referenced Document

• GB/T 14264 Semiconductor material terminology*， 2024-04-25 Update
• GB/T 29057 Practice for evaluating polycrystalline silicon rods by zone fusion pulling and spectroscopic analysis
• GB/T 35306 Determination of Carbon and Oxygen Content in Silicon Single Crystal Low Temperature Fourier Transform Infrared Spectroscopy
• GB/T 8170 Rules of rounding off for numerical values & expression and judgement of limiting values
• GB/T 8322 Molecular absorption spectrometry.Terminology

GB/T 1558-2023 history

• 2023 GB/T 1558-2023 Infrared absorption test method for substituted carbon content in silicon
• 2009 GB/T 1558-2009 Test method for substitutional atomic carbon concent of silicon by infrared absorption
• 1997 GB/T 1558-1997 Test method for substitutional atomic carbon content of silicon by infrared absorption

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