DIN 28401:2022-02
Vacuum technology - Graphical symbols - Summary

Standard No.
DIN 28401:2022-02
Release Date
2022
Published By
German Institute for Standardization  DE  /  DIN
Latest
DIN 28401:2022-02
 
Introduction

Standard Evolution and Technical Background

Since its first publication in 1976, the DIN 28401 standard has undergone two major revisions in 2008 and 2022.

Version New content Deleted content Total number of symbols
1976-11 Basic vacuum pump symbol - 72
2008-03 ISO 7000 international harmonization Circular piston pump symbol 74
2022-02 Screw vacuum pump, English: class=instrument>Scroll vacuum pump
- 77

Analysis of the core symbol system

Classification and identification of vacuum pumps

The standard divides vacuum pumps into three categories, using a unified basic graphic derivative design:

  • Positive displacement pumps: use the basic symbols of compressors (such as serial numbers 1-12)
  • Turbomolecular pumps: use turbine derivative symbols (serial numbers 13-17)
  • Special principle pumps: including diffusion pumps (19), adsorption pumps (20), etc.

Vacuum system component specifications

Articles 25-70 of the standard specify in detail the graphic representation method of pipeline components:

Component Type Key Symbol Direction Requirements
Valve 36-45 Non-directional
Connection 52-59 Connection method must be marked
Measuring Instrument 71-76 Angle tip must face downwards

Implementation and Application Recommendations

Drawing Marking Points

The vacuum system example diagram (Figure 1) provided in Chapter 4 of the standard reveals the following practice specifications:

  1. Main Pump (rotary vane pumps) and pre-pumps must be clearly distinguished
  2. The electromagnetically driven valve (symbol 47) should be marked with the control method
  3. The measuring system must include a sensor (72) and a display unit (76)

Coordination with other standards

This standard must be used in conjunction with the DIN 28400 series of terminology standards and the DIN 28426 pump acceptance specification, especially in:

  • Confirmation of the correspondence between symbols and physical equipment
  • Drawing of system diagrams for compound pump groups
  • Conversion of ISO 7000 symbols in international projects

Industrial case: semiconductor vacuum system

A 300mm wafer production line uses a turbomolecular pump (symbol 17) and a cryogenic pump (symbol 24) combination, according to this standard:

  • Use standard symbol 71 to mark vacuum measurement points on P&ID drawings
  • Indicate maintenance interfaces using symbol 65 (removable connection)
  • Draw gas pipeline branches as required by clause 63

DIN 28401:2022-02 Referenced Document

  • DIN 28400-1:1990 Vacuum technology; terms and definitions; general terms
  • DIN 28400-2:1980 Vacuum technology; terms and definitions, vacuum pumps
  • DIN 28400-3:1992 Vacuum technology; terms and definitions; vacuum gauges
  • DIN 28400-5:1981 Vacuum technology; terms and definitions; vacuum drying and lyophilisation
  • DIN 28402:1976 Vacuum technology; quantities, symbols, units, summary
  • DIN 28403:1986 Vacuum technology; quick release couplings; clamped type couplings
  • DIN 28404:1986 Vacuum technology; flanges; dimensions
  • DIN 28410:1968 Vacuum Technology; Mass Spectrometer Partial Pressure Gauges; Definitions, Characteristics, Operating Conditions
  • DIN 28411:1976 Vacuum technology; acceptance specifications for mass spectrometer-type leak-detector, terms
  • DIN 28416:1976 Vaccum technology; calibration of vacuum gauges within the range of 10<(hoch)-3> to 10<(hoch)-7> mbar, general method: pressure reduction by continuous flow
  • DIN 28417:1976 Vacuum technology; measurement of throughput by the volumetric method at constant pressure
  • DIN 28418-1:1976 Vacuum technology; standard method for vacuum gauge calibration by direct comparison with a reference vacuum gauge
  • ISO 7000:2004 Graphical symbols for use on equipment - Index and synopsis

DIN 28401:2022-02 history

Vacuum technology - Graphical symbols - Summary

Standard and Specification

DIN 28401:1976 Vacuum technology; graphical symbols, summary DIN 28401:2008 Vacuum technology - Graphical symbols - Summary DIN 28401:1976-11 Vacuum technology; graphical symbols, summary DIN 28401:2022 Vacuum technology - Graphical symbols - Summary DIN 28401:2008-03 Vacuum technology - Graphical symbols - Summary DIN 28401 E:2007-04 Draft Document - Vacuum technology - Graphical symbols - Summary DIN 28401 E:2007 Draft Document - Vacuum technology - Graphical symbols - Summary DIN 28402:1976 Vacuum technology; quantities, symbols, units, summary IS 8245-1976 Graphical symbols for vacuum technology


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