This Technical Specification contains terms and definitions that relate to nanomanufacturing processes in the field of nanotechnologies. It represents part of a multi-part documentation on terminology and specifications that covers the various aspects of nanotechnologies. All process terms in this document apply to nanomanufacturing. Many of the processes listed are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes can lead to material properties on the nanoscale, or alternatively on larger scales. There are many other terms related to nanomanufacturing that refer to tools, parts, materials, system control procedures, or metrology procedures, but these are outside the scope of this document.