T/QGCML 3233-2024
Pan-semiconductor industry vacuum pump technical requirements (English Version)

Standard No.

T/QGCML 3233-2024

Language

Chinese, Available in English version

Release Date

2024

Published By

Group Standards of the People's Republic of China

Latest

T/QGCML 3233-2024

Scope

This document specifies the terms and definitions, main parameters, general requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of vacuum pumps in the pan-semiconductor industry. This document applies to the production and inspection of vacuum pumps in the pan-semiconductor industry.

T/QGCML 3233-2024 history

• 2024 T/QGCML 3233-2024 Pan-semiconductor industry vacuum pump technical requirements

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